Browsing by Author "Efremov, A. A."

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Carbon enhancement of SiO2 nucleation in buried oxide synthesis

Efremov, A. A.
;
Litovchenko, V. G.
;
Romanova, G. P.
;
Sarikov, A. V.
;
Claeys, C.
Journal article
2001, Journal of the Electrochemical Society, (148) 5, p.F92-F97
Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling

Romanyuk, B. N.
;
Litovchenko, V. G.
;
Efremov, A. A.
;
Mel'nik, V. P.
;
Claeys, C.
Oral presentation
1998, NATO Advanced Research Workshop on "Perspectives, Sciences and Technologies of Novel Silicon-on-Insulator Devices"; 12-15 Octobe
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation

Litovchenko, V. G.
;
Efremov, A. A.
;
Romanyuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
Journal article
1998, J. Electrochem. Soc., (145) 8, p.2964-2969
Stimulated buried dielectric phase formation for nanelectronic aims

Litovchenko, V. G.
;
Romanyuk, B. N.
;
Efremov, A. A.
;
Mel'nik, V. P.
;
Claeys, Cor
Proceedings paper
1997, Proceedings of the 8th International Symposium on Silicon-on-Insulator Technology and Devices, 31/08/1997, p.81-85
Use of gettering and defect induced processes in ultra-thin buried oxide synthesis

Litovchenko, V. G.
;
Efremov, A. A.
;
Romanuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
Proceedings paper
1997, Proceedings of the 7th Conference on Gettering and Defect Engineering in the Semiconductor Technology - GADEST '97, 5/10/1997, p.97-102