Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
Publication:
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
Date
1998
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
2445.pdf
2.08 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Litovchenko, V. G.
;
Efremov, A. A.
;
Romanyuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
Journal
J. Electrochem. Soc.
Abstract
Description
Metrics
Views
1937
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations
Metrics
Views
1937
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations