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Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
Publication:
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
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Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Litovchenko, V. G.
;
Efremov, A. A.
;
Romanyuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
Journal
J. Electrochem. Soc.
Abstract
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1943
since deposited on 2021-10-01
3
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1943
since deposited on 2021-10-01
3
last month
Acq. date: 2025-12-11
Citations