Publication:

Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation

Date

1998
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorLitovchenko, V. G.
dc.contributor.authorEfremov, A. A.
dc.contributor.authorRomanyuk, B. N.
dc.contributor.authorMel'nik, V. P.
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-01T08:29:08Z
dc.date.available2021-10-01T08:29:08Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2735
dc.source.beginpage2964
dc.source.endpage2969
dc.source.issue8
dc.source.journalJ. Electrochem. Soc.
dc.source.volume145
dc.title

Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
2445.pdf
Size:
2.08 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles