Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Egloff, R."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Analysis of process-induced stresses in lateral trench isolation structures for high voltage devices in bonded SOI wafers

    Baumgart, H.
    ;
    Letavic, T. J.
    ;
    De Wolf, Ingrid  
    ;
    Maes, Herman
    ;
    Egloff, R.
    Proceedings paper
    1995, Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications, 21/05/1995, p.440-54

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings