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    Multivariate analysis of a 100-nm process measured by in-line scatterometry

    Egret, S.
    ;
    Furusho, Tetsunari
    ;
    Baudemprez, Bart  
    Proceedings paper
    2004, Metrology, Inspection, and Process Control for Microlithography XVIII, 22/02/2004, p.296-306

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