Browsing by Author "Eibelhuber, Martin"

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High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology

Lenk, Claudia
;
Krivoshapkina, Yana
;
Hofmann, Martin
;
Lenk, Steve
;
Tzvetan, Ivanov
;
Rangelow, Ivo
Journal article
2019, Journal of Vacuum Science and Technology B, (37) 2, p.21603
Wafer-level nanoimprint lithography for single electron transistors

Glinsner, Thomas
;
Eibelhuber, Martin
;
Treiblmayr, Dominik
;
Schamberger, Barbara
;
Chouiki, M.
Meeting abstract
2017, 16th International Conference on Nanoimprint and Nanoprint Technology - NNT, 8/11/2017