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High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology
Publication:
High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology
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Date
2019
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lenk, Claudia
;
Krivoshapkina, Yana
;
Hofmann, Martin
;
Lenk, Steve
;
Tzvetan, Ivanov
;
Rangelow, Ivo
;
Ahmad, Ahmad
;
Reum, Alexander
;
Holz, M
;
Glinsner, Thomas
;
Eibelhuber, Martin
;
Treiblmayr, Dominik
;
Schamberger, Barbara
;
Chan, BT
;
El Otell, Ziad
;
de Marneffe, Jean-Francois
Journal
Journal of Vacuum Science and Technology B
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1999
since deposited on 2021-10-27
Acq. date: 2025-12-10
Citations
Metrics
Views
1999
since deposited on 2021-10-27
Acq. date: 2025-12-10
Citations