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Browsing by Author "Eiichiro, Shiba"

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    Publication

    Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes

    Tomomi, Takayama
    ;
    Taishi, Ebisudani
    ;
    Eiichiro, Shiba
    ;
    Sepulveda Marquez, Alfonso  
    Journal article
    2021, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (39) 4

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