Browsing by Author "El Ghannudi, Hamza"
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Publication Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
Journal article2013-01, Sensors and Actuators A: Physical, 189, p.218-232Publication High-Sensitivity Large-Throughput Broadband Tunable Microwave Wear Debris Sensing System