Browsing by Author "El Rifai, Joumana"
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Publication Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
Meeting abstract2010, MRS Fall Meeting Symposium S: Micromechanical Systems - Materials and Devices IV, 29/11/2010, p.S2.5Publication Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
Proceedings paper2011, Micromechanical Systems - Materials and Devices IV, 29/11/2010, p.mrsf10-1299-s02-Publication Fabrication of poly-SiGe MEMS structures with a substrate budget of 250°C
El Rifai, JoumanaPHD thesis2012-11Publication Harsh laser annealing techniques for improved crystallization of a-Si(Ge) layers deposited at 210C
Proceedings paper2009, Annual Workshop on Semiconductor Advances for Future Electronics - SAFE, 26/11/2009, p.63-66Publication Laser annealed SiGe devices for MEMS applications at temperatures below 250C
Proceedings paper2011, 16th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS, 5/06/2011, p.1336-1339Publication Laser-induced crystallization of SiGe MEMS structural layers deposited at temperatures below 250C
Proceedings paper2009, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology, 13/04/2009, p.1153-A19-03Publication Pulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvesters
Publication Selective laser annealing for improved SiGe MEMS structural layers at 210°C
Proceedings paper2010, 23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS, 24/01/2010, p.324-327Publication SiGe MEMS at processing temperatures below 250C
Journal article2012, Sensors and Actuators A: Physical, 188, p.230-239Publication Structural and electrical properties of pulsed laser deposited bismuth telluride based alloys