Browsing by Author "Elam, Jeffrey W."

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Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Grella, Luca
;
Carroll, Alan
;
Murray, Kirk
;
McCord, Mark A.
;
Tong, William M.
;
Brodie, Alan D.
Journal article
2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31107
Structural Changes during the Conversion Reaction of Tungsten Oxide Electrodes with Tailored, Mesoscale Porosity

Kim, Jae Jin
;
Zhou, Chun
;
Mane, Anil U.
;
Suh, Hyo Seon
;
Kim, Soojeong
;
Shi, Bing
;
Fenter, Paul
Journal article
2022, ACS NANO, (16) 14, p.5384-5392