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Browsing by Author "Elers, K. E."

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    Publication

    Enhancement of ALCVD(TM) TiN growth on Si-O-C and a-SiC:H films by O2-based plasma treatments

    Satta, Alessandra
    ;
    Baklanov, Mikhaïl
    ;
    Richard, Olivier  
    ;
    Vantomme, Andre  
    ;
    Bender, Hugo  
    Journal article
    2002, Microelectronic Engineering, (60) 1_2, p.59-69

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