Publication:
Enhancement of ALCVD(TM) TiN growth on Si-O-C and a-SiC:H films by O2-based plasma treatments
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1884 since deposited on 2021-10-14
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Acq. date: 2026-08-04
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Statistics
Views
1884 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-08-04
Citations