Publication:

Enhancement of ALCVD(TM) TiN growth on Si-O-C and a-SiC:H films by O2-based plasma treatments

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

1874 since deposited on 2021-10-14
Acq. date: 2025-10-23

Citations

Metrics

Views

1874 since deposited on 2021-10-14
Acq. date: 2025-10-23

Citations