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Browsing by Author "Ellison, Christopher J."

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    Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers

    Doise, Jan  
    ;
    Mannaert, Geert  
    ;
    Suh, Hyo Seon  
    ;
    Rincon Delgadillo, Paulina  
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2018, 4th International Symposium on DSA, 11/11/2018
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    Strategies for increasing the rate of defect annihilation in the directed self-assembly of high- $v block copolymers

    Doise, Jan  
    ;
    Koh, Jai Hyun
    ;
    Kim, Ji Yeon
    ;
    Zhu, Qingjun
    ;
    Kinoshita, Natsuko
    ;
    Suh, Hyo Seon  
    Journal article
    2019, ACS Applied Materials & Interfaces, (11) 51, p.48419-48427
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    Understanding interdependency through complex information sharing

    Rosas, Fernando
    ;
    Ntranos, Vasilis
    ;
    Ellison, Christopher J.
    ;
    Pollin, Sofie  
    ;
    Verhelst, Marian  
    Journal article
    2016, Entropy, (18) 2, p.38

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