Publication:
Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers
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1989 since deposited on 2021-10-25
1last month
Acq. date: 2025-12-10
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Metrics
Views
1989 since deposited on 2021-10-25
1last month
Acq. date: 2025-12-10
Citations