Publication:
Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers
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1993 since deposited on 2021-10-25
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Acq. date: 2026-09-20
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Statistics
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1993 since deposited on 2021-10-25
2last month
1last week
Acq. date: 2026-09-20
Citations