Publication:
Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers
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1988 since deposited on 2021-10-25
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Acq. date: 2025-10-25
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Views
1988 since deposited on 2021-10-25
451item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations