Publication:
Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers
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1991 since deposited on 2021-10-25
2last month
Acq. date: 2026-01-08
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Metrics
Views
1991 since deposited on 2021-10-25
2last month
Acq. date: 2026-01-08
Citations