Browsing by Author "Engelen, A."
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Publication Impact of high order aberrations on the performance of the aberration monitor
Proceedings paper2000, Optical Microlithography XIII, 1/03/2000, p.9-17Publication Implementation of pattern-specific illumination pupil optimization on Step & Scan systems
Proceedings paper2004, Optical Microlithography XVII, 22/02/2004, p.1323-1333Publication Separable models for computational lithography