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Conference contributions
Impact of high order aberrations on the performance of the aberration monitor
Publication:
Impact of high order aberrations on the performance of the aberration monitor
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Date
2000
Proceedings Paper
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19023.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dirksen, P.
;
Juffermans, C.
;
Engelen, A.
;
De Bisschop, Peter
;
Muellerke, H.
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1845
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Acq. date: 2025-12-11
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Metrics
Views
1845
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations