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Browsing by Author "Erfurth, E."

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    Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation

    Reiche, M.
    ;
    Moutanabbir, O.
    ;
    Himcinschi, C.
    ;
    Christiansen, S.
    ;
    Erfurth, E.
    ;
    Goesele, U.
    ;
    Mantl, S.
    Proceedings paper
    2008, Semiconductor Wafer Bonding 10: Science, Technology, and Applications, 12/10/2008, p.311-320

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