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Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation
Publication:
Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Reiche, M.
;
Moutanabbir, O.
;
Himcinschi, C.
;
Christiansen, S.
;
Erfurth, E.
;
Goesele, U.
;
Mantl, S.
;
Buca, D.
;
Zhao, Q. T.
;
Loo, Roger
;
Nguyen, Duy
;
Muster, F.
;
Petzold, M.
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1896
since deposited on 2021-10-17
Acq. date: 2025-12-09
Citations
Metrics
Views
1896
since deposited on 2021-10-17
Acq. date: 2025-12-09
Citations