Browsing by Author "Esch, Heleen"
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Publication Influence of the morphology of the gas sensitive layer on the performance of thin film tin oxide sensors
Oral presentation2000, 8th International Meeting on Chemical Sensors; July 2000; Basel, Switzerland.Publication Planarization of deep trenches
Proceedings paper2001, Micromachining and Microfabrication Process Technology VII, 22/10/2001, p.49-57Publication The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors
Proceedings paper1998, Technical Digest of the 7th International Meeting on Chemical Sensors, 27/06/1998, p.583-585Publication The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
Journal article2000, Sensors and Actuators B, 65, p.190-192Publication Thin-film oxide gas sensors and their sensitivity to ethene
Esch, HeleenPHD thesis2002-03