Publication:

Planarization of deep trenches

Date

2001
Proceedings Paper
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Author(s)

Rusu, Cristina
;
Klaasse, Gerard
;
Sedky, Sherif
;
Esch, Heleen
;
Parmentier, Brigitte  
;
Verbist, Agnes
;
Witvrouw, Ann

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2032 since deposited on 2021-10-14
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