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Browsing by Author "Eusner, T"

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    Controlling scratching in Cu chemical-mechanical planarization (CuCMP)

    Eusner, T
    ;
    Saka, N
    ;
    Chun, Jung-Hoon
    ;
    Armini, Silvia  
    ;
    Moinpour, M
    ;
    Fisher, P. J.
    Proceedings paper
    2008, Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Inter-level Dielectrics, 12/10/2008, p.15-27

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