Browsing by Author "Eymery, Guillaume"
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Publication Optical absorption and characteristics of low-k films and barrier layers in the UV range
Meeting abstract2007, MRS Spring Meeting Symposium B: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nano, 9/04/2007Publication Optical characteristics of low-k films and barrier layers in the ultra-violet range
Proceedings paper2007, 4th International Conference on Spectroscopic Ellipsometry - ICSE, 11/06/2007Publication Optical property changes in low-k films upon ultraviolet-assisted curing