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Optical absorption and characteristics of low-k films and barrier layers in the UV range
Publication:
Optical absorption and characteristics of low-k films and barrier layers in the UV range
Date
2007
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eslava Fernandez, Salvador
;
Eymery, Guillaume
;
Foubert, Philippe
;
Iacopi, Francesca
;
Maex, Karen
;
Baklanov, Mikhaïl
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1860
since deposited on 2021-10-16
415
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1860
since deposited on 2021-10-16
415
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations