Publication:
Optical absorption and characteristics of low-k films and barrier layers in the UV range
Date
| dc.contributor.author | Eslava Fernandez, Salvador | |
| dc.contributor.author | Eymery, Guillaume | |
| dc.contributor.author | Foubert, Philippe | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Foubert, Philippe | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T16:03:01Z | |
| dc.date.available | 2021-10-16T16:03:01Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12134 | |
| dc.source.conference | MRS Spring Meeting Symposium B: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nano | |
| dc.source.conferencedate | 9/04/2007 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Optical absorption and characteristics of low-k films and barrier layers in the UV range | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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