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Browsing by Author "Félix, P."

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    The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

    De Keersmaecker, Roger  
    ;
    Declerck, Gilbert  
    ;
    Félix, P.
    ;
    Haond, M.
    ;
    Hill, C.
    ;
    Janssen, G.
    ;
    Lorenz, J.
    Journal article
    1994, J. Vac. Sci. Technol. B, (12) 4, p.2852-2859

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