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Browsing by Author "Faheem, Mohammad"

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    Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks

    Wood, Obert
    ;
    Wong, Keith
    ;
    Parks, Valentin
    ;
    Kearney, Patrick
    ;
    Meyer-Ilse, Julia
    ;
    Luong, Vu  
    Proceedings paper
    2016, Extreme Ultraviolet (EUV) Lithography, 21/02/2016, p.977619

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