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Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks
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1896 since deposited on 2021-10-23
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Acq. date: 2025-10-24
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Views
1896 since deposited on 2021-10-23
421item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations