Publication:

Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks

Date

2016

Proceedings Paper

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Files

34649.pdf 4.66 MB

Author(s)

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Parks, Valentin

;

Kearney, Patrick

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Meyer-Ilse, Julia

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;

Philipsen, Vicky

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Faheem, Mohammad

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;

;

;

Bennett, Corbin

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;

Gribelyuk, Michael

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;

Mangat, Pawitter

;

van der Heide, Paul

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Acq. date: 2026-04-05