Browsing by Author "Falepin, A."
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Study of dopant diffusion and defect evolution for advanced ultra shallow junctions based on atomistic kinetic monte carlo approach
Proceedings paper2007, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 18/09/2007, p.712-713