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Browsing by Author "Falepin, A."

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    Study of dopant diffusion and defect evolution for advanced ultra shallow junctions based on atomistic kinetic monte carlo approach

    Noda, T.
    ;
    Vandervorst, Wilfried  
    ;
    Felch, S.
    ;
    Parihar, V.
    ;
    Vrancken, Christa  
    ;
    Severi, Simone  
    Proceedings paper
    2007, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 18/09/2007, p.712-713

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