Browsing by Author "Fan, Yongfa"

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Binary modeling method to check the sub-resolution assist features (SRAFs) printability

Li, Jianliang
;
Gao, Weimin
;
Fan, Yongfa
;
Xue, Jing
;
Yan, Qiliang
;
Lucas, Kevin
;
De Bisschop, Peter
Proceedings paper
2012, Optical Microlithography XXV, 12/02/2012, p.83261D
Mask-induced polarization effects at high NA

Estroff, Andrew
;
Fan, Yongfa
;
Bourov, Anatoly
;
Smith, Bruce
;
Foubert, Philippe
;
Leunissen, Peter
Proceedings paper
2005-03, Optical Microlithography XVIII, 28/02/2005, p.555-566