Browsing by Author "Fang, Chao"
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Publication A compact physical CD-SEM simulator for IC photolithography modeling applications
Proceedings paper2014, Scanning Microscopies 2014, 16/09/2014, p.923618Publication Investigation of interactions between metrology and lithography with a CD SEM simulator
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.905109Publication Understanding the impact of CD-SEM artifacts on metrology via experiments and simulations
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94242A