Browsing by Author "Fang, Hawren"
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Publication Analytical methods for SEM image enhancement: Noise and charging effect reduction for precise contour extraction.
Proceedings paper2025, 40th European Mask and Lithography Conference - EMLC, 2025-06-16, p.37871FPublication Defect-aware data augmentation for improving machine learning-based contour extraction from SEM images
Journal article2025, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (24) 3, p.034005Publication Machine Learning-based SEM Images Contour Extraction Data Augmentation
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134262X