Publication:

Machine Learning-based SEM Images Contour Extraction Data Augmentation

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051484

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Author(s)

Zhang, Hongming

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Gillijns, Werner

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Journal

Proceedings of SPIE

Statistics

54 since deposited on 2025-07-28

Acq. date: 2026-03-19