Publication:

Machine Learning-based SEM Images Contour Extraction Data Augmentation

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051484
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dc.contributor.authorZhang, Hongming
dc.contributor.authorMa, Yuansheng
dc.contributor.authorFang, Hawren
dc.contributor.authorZeng, Xuefeng
dc.contributor.authorHong, Le
dc.contributor.authorSun, Yuyang
dc.contributor.authorMeng, Renyang
dc.contributor.authorGillijns, Werner
dc.contributor.authorWu, Wei
dc.contributor.imecauthorMeng, Renyang
dc.contributor.imecauthorGillijns, Werner
dc.contributor.orcidimecMeng, Renyang::0009-0003-7321-0578
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.date.accessioned2025-07-28T03:57:06Z
dc.date.available2025-07-28T03:57:06Z
dc.date.issued2025
dc.identifier.doi10.1117/12.3051484
dc.identifier.eisbn978-1-5106-8639-7
dc.identifier.isbn978-1-5106-8638-0
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45944
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage134262X
dc.source.conference2025 Conference on Metrology Inspection and Process Control-Annual
dc.source.conferencedate2025-02-24
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages6
dc.title

Machine Learning-based SEM Images Contour Extraction Data Augmentation

dc.typeProceedings paper
dspace.entity.typePublication
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