Browsing by Author "Fang, Wei"

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Process window and defect monitoring using high-throughput e-beam inspection guided by computational hot spot detection

Wang, Fei
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Zhang, Pencheng
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Fang, Wei
;
Liu, Kevin
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Jau, Jack
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Wang, Lester
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Wan, Alex
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Hunsche, Stefan
Proceedings paper
2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97783F
Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device

Halder, Sandip
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Leray, Philippe
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Di Lorenzo, Paolo
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Wang, Fei
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Zhang, Pengcheng
;
Fang, Wei
Proceedings paper
2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97780O