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Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device
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1947 since deposited on 2021-10-23
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Acq. date: 2025-10-24
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1947 since deposited on 2021-10-23
447item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations