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Browsing by Author "Felix, Nelson M."

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    CNT pellicles: Imaging results of the first full-field EUV exposures

    Bekaert, Joost  
    ;
    Gallagher, Emily  
    ;
    Jonckheere, Rik  
    ;
    Van Look, Lieve  
    ;
    Aubert, Remko  
    Proceedings paper
    2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090Z

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