Publication:

CNT pellicles: Imaging results of the first full-field EUV exposures

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2584724

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Author(s)

;

Gallagher, Emily

;

Jonckheere, Rik

;

Van Look, Lieve

;

;

Klein, Alexander

;

;

;

Felix, Nelson M.

;

;

Nair, Vineet Vijayakrishnan

;

Timmermans, Marina

;

Pollentier, Ivan

;

Hendrickx, Eric

Journal

Proceedings of SPIE

Metrics

1921 since deposited on 2022-03-11

1last month

Acq. date: 2025-12-12