Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Feng, Hong Zhang"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Bottom-ARC optimization methodology for 0.25μm lithography and beyond

    Op de Beeck, Maaike  
    ;
    Vandenberghe, Geert  
    ;
    Jaenen, Patrick  
    ;
    Feng, Hong Zhang
    ;
    Delvaux, Christie  
    Proceedings paper
    1998, Optical Microlithography XI, 25/02/1998, p.322-336

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings