Publication:
Bottom-ARC optimization methodology for 0.25μm lithography and beyond
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Acq. date: 2025-10-23
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2029 since deposited on 2021-10-01
Acq. date: 2025-10-23
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2 since deposited on 2021-10-01
Acq. date: 2025-10-23
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2029 since deposited on 2021-10-01
Acq. date: 2025-10-23
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