Browsing by Author "Feurprier, Y."
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Publication Improving uniformity of 3-level High Aspect Ratio Supervias
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Patterning process and electrical yield optimization at the limits of single exposure EUV 0.33 NA: a pitch 26nm damascene process
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