Publication:

Improving uniformity of 3-level High Aspect Ratio Supervias

Date

2023

Proceedings Paper

https://doi.org/10.1109/IITC/MAM57687.2023.10154787

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Author(s)

Montero Alvarez, Daniel

;

Marien, Philippe

;

Hermans, Yannick

;

Vega Gonzalez, Victor

;

;

;

Buccheri, Nunzio

;

;

Martinez Alanis, Gerardo Tadeo

;

;

Puliyalil, Harinarayanan

;

Decoster, Stefan

;

;

Lazzarino, Frederic

;

;

;

Journal

N/A

Metrics

784 since deposited on 2023-08-07

Acq. date: 2025-12-15