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Browsing by Author "Fischer, A."

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    Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy

    Dombrowski, Kai
    ;
    Fischer, A.
    ;
    Dietrich, B.
    ;
    De Wolf, Ingrid  
    ;
    Bender, Hugo  
    ;
    Pochet, Sandrine
    Proceedings paper
    1999, International Electron Devices Meeting. Technical digest; 5-8 Dec. 1999; Washington, D.C., USA., p.357-360

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