Browsing by Author "Fischer, A."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy
Proceedings paper1999, International Electron Devices Meeting. Technical digest; 5-8 Dec. 1999; Washington, D.C., USA., p.357-360