Browsing by Author "Fischer, F."

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New low-stress PECVD Poly-SiGe layers for MEMS

Rusu, Cristina
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Sedky, S.
;
Parmentier, Brigitte
;
Verbist, Agnes
;
Richard, Olivier
;
Brijs, Bert
Journal article
2003, Journal of Microelectromechanical Systems, (12) 6, p.816-825
Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Hoechst, A.
;
Scheuerer, R.
;
Stahl, H.
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Fischer, F.
;
Metzger, L.
;
Reichenbach, R.
;
Laermer, F.
Journal article
2004, Sensors and Actuators A, (114) 2_3, p.355-361
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers

Stahl, H.
;
Hoechst, A.
;
Fischer, F.
;
Metzger, L.
;
Reichenbach, R.
;
Laermer, F.
;
Kronmueller, S.
Proceedings paper
2003, Proceedings of Transducers. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, 8/06/2003, p.1899-1902