New low-stress PECVD Poly-SiGe layers for MEMS

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Published version 1.65 MB

Author(s)

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Parmentier, Brigitte

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Richard, Olivier

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Kronmüller, S.

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Journal

Journal of Microelectromechanical Systems

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1963 since deposited on 2021-10-15

Acq. date: 2025-10-23