Browsing by Author "Fisher, P."

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Controlling scratching in Cu Cchemical-mechanical planarization (CuCMP)

Eusner, Thor
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Saka, N.
;
Chun, J-H
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Armini, Silvia
;
Moinpour, M.
;
Fisher, P.
Meeting abstract
2008, 214th ECS Meeting, 12/10/2008, p.2064
Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP

Sinapi, Fabrice
;
Heylen, Nancy
;
Travaly, Youssef
;
Vereecke, Guy
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Baklanov, Mikhaïl
;
Kesters, Els
Journal article
2007, Microelectronic Engineering, (84) 11, p.2620-2623