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Browsing by Author "Floetgen, Christoph"

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    Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding

    Doppelbauer, David
    ;
    Floetgen, Christoph
    ;
    Gabas, Ignacio Gabriel Vicente
    ;
    Iacovo, Serena  
    Proceedings paper
    2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024

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