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Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding
Publication:
Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding
Date
2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732483
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Doppelbauer, David
;
Floetgen, Christoph
;
Gabas, Ignacio Gabriel Vicente
;
Iacovo, Serena
;
Brems, Steven
;
Beyne, Eric
;
Duchoslav, Jiri
;
Groiss, Heiko
Journal
N/A
Abstract
Description
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Views
252
since deposited on 2025-03-06
Acq. date: 2025-10-27
Citations
Metrics
Views
252
since deposited on 2025-03-06
Acq. date: 2025-10-27
Citations