Publication:

Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding

Date

2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732483
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Doppelbauer, David
;
Floetgen, Christoph
;
Gabas, Ignacio Gabriel Vicente
;
Iacovo, Serena  
;
Brems, Steven  
;
Beyne, Eric  
;
Duchoslav, Jiri
;
Groiss, Heiko

Journal

N/A

Abstract

Description

Statistics

Views

260 since deposited on 2025-03-06
2last month
1last week
Acq. date: 2026-04-05

Citations

Statistics

Views

260 since deposited on 2025-03-06
2last month
1last week
Acq. date: 2026-04-05

Citations