Publication:
Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding
| dc.contributor.author | Doppelbauer, David | |
| dc.contributor.author | Floetgen, Christoph | |
| dc.contributor.author | Gabas, Ignacio Gabriel Vicente | |
| dc.contributor.author | Iacovo, Serena | |
| dc.contributor.author | Brems, Steven | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.author | Duchoslav, Jiri | |
| dc.contributor.author | Groiss, Heiko | |
| dc.contributor.imecauthor | Iacovo, Serena | |
| dc.contributor.imecauthor | Brems, Steven | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.orcidimec | Iacovo, Serena::0000-0002-0826-9165 | |
| dc.contributor.orcidimec | Brems, Steven::0000-0002-0282-8528 | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2025-04-16T08:42:22Z | |
| dc.date.available | 2025-03-06T20:45:28Z | |
| dc.date.available | 2025-04-16T08:42:22Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | The financial support by the Austrian Federal Ministry of Labour and Economy, the National Foundation for Research, Technology and Development and the Christian Doppler Research Association is gratefully acknowledged. | |
| dc.identifier.doi | 10.1109/IITC61274.2024.10732483 | |
| dc.identifier.eisbn | 979-8-3503-8517-5 | |
| dc.identifier.isbn | 979-8-3503-8518-2 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45317 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 International Interconnect Technology Conference | |
| dc.source.conferencedate | JUN 03-06, 2024 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 3 | |
| dc.title | Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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