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Browsing by Author "Foad, M."

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    Conformal doping of FINFET's: a fabrication and metrology challenge

    Vandervorst, Wilfried  
    ;
    Everaert, Jean-Luc
    ;
    Rosseel, Erik  
    ;
    Jurczak, Gosia  
    ;
    Hoffmann, Thomas
    Proceedings paper
    2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.449-456

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